• 产品名称: 等离子体增强回转PECVD系统 /Plasma enhanced rotational PECVD system

Main features:

主要特点

 

Ø The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .

 

我司研制的回转PECVD系统能使整个实验腔体都处于辉光产生区,辉光均匀等效,这种技术很好的解决了传统等离子工作不稳定状态,这样离子化的范围和强度是传统PECVD的百倍,并解决了物料不均匀堆积现象

Ø Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to  35 degree.

该款设备选用特殊形状(两头细中间粗)的石英管作为化学气相沉积的反应室;加热的同时炉管可360度旋转,管内壁有石英挡片帮助粉体材料翻炒有助于烧结得更均匀;而且炉体可左右大角度倾斜,方便进出料,倾斜角度在0~35°可调。

 

Ø Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.

此款设备现广泛应用于低温石墨烯制备实验、粉体材料碳包覆实验。

 

 

Technical Parameters

技术参数

Furnace加热炉

Max. Tem

1200°C

Heating zone length电压

440mm

Constant zone length

200mm



Temperature Controller

控温方式

PID automatic control and auto-tune function.

 模糊PID控制和自整定调节

30 programmable segments for precise thermal processing.

智能化30段可编程控制

Built-in protection for the over-heated and broken thermocouple. 

超温和断偶报警功能

Operation interface is 7 "industrial control computer

操作界面为7”工控电脑

Heating Elements

加热元件

· Resistance wire, Fe-Cr-Al Alloy doped by Mo

电阻丝(掺钼铁铬铝合金)

Temperature Accuracy

控温精度

+/- 1 °C

Processing tube

炉管

Size:Φ60*420+Φ100*360+Φ60*420mm

尺寸:Φ60*420+Φ100*360+Φ60*420mm

Furnace tube rotation rate:3~13r/min

炉管转速:3~13r/min

Furnace body inclination angle

0~35°(adjustable

PE source PE源

Signal frequency信号频率

13.56 MHz±0.005%

Power output range功率输出范围

0-500W

 

RF output interface射频输出接口

50 Ω, N-type, female

Power stability功率稳定性

5W

Gas supply system气路系统

High precision mass Flowmeter(Range optional

高精度质量流量计(量程可选)

Accuracy准确度

±1.5%

Response accuracy响应精度

 

· ±0.2%

Response time响应时间

 

Gas characteristics:14sec

  气特性

Electrical characteristics:10sec

  电特性

Working pressure difference range工作压差范围

 

0.1~0.5MPa

Max. pressure最大压力

 

· 3MPa

Connection 连接头类型

 

Φ6mmDouble clasp stainless steel joint

Φ6mm双卡套不锈钢接头

 

Vacuum unit真空系统

KF25 series bellows and manual stopper valves

采用KF25系列波纹管和手动挡板阀

Vacuum up to10-1Pa

真空度可达10-1Pa

The value can be displayed intuitively by the digital display vacuum tester

 

数显真空测试仪可直观的显示数值

 

 

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