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自动RTP快速升温管式炉/Automatic RTP fast heating tube furnace
①Open RTP rapid heating tube furnace by our company independent research and development of powerful heating equipment.
开启式RTP快速升温管式炉由我公司自主研发的功能强大的加热设备。
②The product adopts international advanced manufacturing technology, novel shape and reasonable structure.
该产品采用国际先进制造工艺,造型新颖结构合理。
③Furnace body furnace tube can realize automatic separation, furnace body up and down two half design, can be opened freely, safe and reliable.
炉体炉管可实现自动分离,炉体上下两半设计,可以自由打开,安全可靠。
④The furnace was formed by vacuum adsorption of high density pure alumina and light fiber material.
炉胆采用高密度纯氧化铝聚轻纤维材料真空吸附成型。
⑤The surface is coated with ultra-high temperature protective coating with high reflectivity, which can not only maintain the minimum energy loss, but also enhance the high temperature stability, which can effectively reduce the heat loss.
表面涂覆高反射率的超高温保护涂层,除能够保持其能量的最低损耗,还能增强高温稳定性,可有效减少热能损耗。
⑥The system can be used for rapid annealing after ion implantation and also for ohmic contact rapid alloys.
该系统可满足离子注入后的快速退火,也可用于欧姆接触快速合金。
⑦It can also be used for annealing of silicide alloy, oxide growth, and selenium deposition in copper indium gallium selenium photovoltaic applications.
还可用于硅化物合金退火,氧化物生长,以及铜铟镓硒光伏应用中的硒沉积等快速热处理工艺场合。
⑧Double tube design is the best way to make graphene, and the furnace body and tube can slide freely.
采用双管设计,是石墨烯的制作的最好手段,炉体和炉管可以自由滑动。
⑨Gas, temperature and vacuum can be controlled synchronously, and automation can be realized at the same time.
气体和温度及真空之间可以同步控制,可以同时实现自动化工艺。
⑩Equipped with a computer can control the temperature, vacuum and gas flow.
配上电脑可以对温度、真空和气体流量实现控制。
Because it can realize systematic control, it will be very helpful for repeatability of operation and experiment.
由于可以实现系统化控制,对于操作和实验的重复性会非常有帮助。
This device is an essential piece of equipment in the laboratory.
该设备是实验室必备的一款设备。
Project 项目 |
Main technical index 主要技术指标 |
Data 数据 |
Temperature control温度控制 |
Maximum temperature point 最高温度点 |
1200℃ |
Rated temperature 额定温度 |
1100℃ |
|
Steady state temperature range稳定状态温度范围 |
100~1050℃ |
|
Accuracy of temperature measurement 温度测量精度 |
±0.2℃ |
|
Repeatability of temperature control 温度控制重复性 |
±1℃ |
|
Temperature control accuracy 温度控制精确度 |
±1℃ |
|
Temperature field uniformity 温场均匀性 |
±2℃ |
|
Temperature state process time 温度状态工艺时间 |
2~100(100~1050℃) |
|
Fastest heating rate 最快升温速率 |
30℃/S (can be customized according to customer needs) 30℃/S(可根据客户需求定制) |
|
Cooling rate 降温速率 |
1 ~ 300, can be used to open the furnace body cooling or remove the furnace tube cooling while starting the flowmeter valve control gas cooling 1~300,可以采用打开炉体降温或移除炉管降温同时启动流量计阀控控制气体冷却 |
|
Temperature control mode 温度控制模式 |
Intelligent fuzzy full closed loop control 智能模糊全闭环控制 |
|
|
Touch screen size 触摸屏尺寸 |
7"LCD industrial computer 7"LCD 工控电脑 |
物理指标 |
Maximum power (KW) 最大功率(KW) |
24 |
Rated voltage 额定电压 |
220V/AC380 to 400V 50-60 Hz Automatic matching 220V/AC380~400V 50-60HZ 自动匹配 |
|
Sensor type 传感器类型 |
k-type K型 |
|
Diameter of the reaction chamber 反应腔室内径尺寸 |
Φ180×580 |
|
Pattern effective space 式样有效空间 |
6'' |
|
Dimensions of air extraction port 抽气端口尺寸 |
KF25 |
|
Size of air supply port 供气口尺寸 |
Φ6mm double card sleeve Φ6mm双卡套 |
|
Cooling mode 冷却方式 |
Naturally cooled or forced air cooled N2 or compressed air: 2psi (0.14kg/cm2) -- 7psi (0.5kg/cm2) 自然冷却或强迫风冷N2或压缩空气:2psi(0.14kg/cm2)– 7psi(0.5kg/cm2) |
|
External net size 外形净尺寸 |
L920×W500×H560mm |
|
Weight 重量 |
About 80Kg 约80Kg |