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等离子体增强回转PECVD系统 /Plasma enhanced rotational PECVD system
主要特点Main features:
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .
我司研制的回转PECVD系统能使整个实验腔体都处于辉光产生区，辉光均匀等效，这种技术很好的解决了传统等离子工作不稳定状态，这样离子化的范围和强度是传统PECVD的百倍，并解决了物料不均匀堆积现象
Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.
该款设备选用特殊形状(两头细中间粗)的石英管作为化学气相沉积的反应室;加热的同时炉管可360度旋转，管内壁有石英挡片帮助粉体材料翻炒有助于烧结得更均匀;而且炉体可左右大角度倾斜，方便进出料，倾斜角度在0~35°可调。
Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.
此款设备现广泛应用于低温石墨烯制备实验、粉体材料碳包覆实验。
技术参数Technical Parameters
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Furnace加热炉 |
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Max. Tem |
1200℃ |
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Heating zone length电压 |
440mm |
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Constant zone length |
200mm |
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控温方式 |
PID automatic control and auto-tune function. 模糊PID控制和自整定调节 30 programmable segments for precise thermal processing. 智能化30段可编程控制 Built-in protection for the over-heated and broken thermocouple. 超温和断偶报警功能 Operation interface is 7 "industrial control computer 操作界面为7”工控电脑 |
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Heating Elements 加热元件 |
Resistance wire, Fe-Cr-Al Alloy doped by Mo 电阻丝（掺钼铁铬铝合金） |
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Temperature Accuracy 控温精度 |
+/- 1℃ |
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Processing tube 炉管 |
Size：Φ60*420+Φ100*360+Φ60*420mm 尺寸：Φ60*420+Φ100*360+Φ60*420mm Furnace tube rotation rate：3~13r/min 炉管转速：3~13r/min
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Furnace body inclination angle |
0~35°（adjustable） |
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PE source PE源 |
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Signal frequency信号频率 |
13.56 MHz±0.005% |
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Power output range功率输出范围 |
0-500W |
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RF output interface射频输出接口 |
50 Ω, N-type, female |
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Power stability功率稳定性 |
≤5W |
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Gas supply system气路系统 |
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High precision mass Flowmeter（Range optional） |
高精度质量流量计（量程可选）
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Accuracy准确度 |
±1.5% |
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Response accuracy响应精度 |
±0.2% |
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Response time响应时间 |
Gas characteristics：1～4sec 气特性 Electrical characteristics:10sec 电特性 |
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Working pressure difference range工作压差范围 |
0.1～0.5MPa |
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Max. pressure最大压力 |
3MPa |
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Connection 连接头类型 |
Φ6mmDouble clasp stainless steel joint Φ6mm双卡套不锈钢接头
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Vacuum unit真空系统 |
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KF25 series bellows and manual stopper valves |
采用KF25系列波纹管和手动挡板阀
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Vacuum up to10-1Pa |
真空度可达10-1Pa |
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The value can be displayed intuitively by the digital display vacuum tester |
数显真空测试仪可直观的显示数值 |
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