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产品名称

电阻真空计 INFICON Capacitance Diaphragm Gauge

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产品描述
产品参数

  This is a Pirani Capacitance Diaphragm Gauge (EQ-PGC-554) combines the patented ceramic capacitance diaphragm sensor technology with the advantages of a Pirani gauge in a single product. In the measurement range between 10 mbar and atmosphere, the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement.

  With the need to factor gas type dependency into the pressure reading output being eliminated, risks of explosions in tube vessels or other chambers due to incorrect display of pressure AND/OR negligence of adjustment for gas types ARE GREATLY REDUCED.

Features

Designed and made by Switzerland-based INFICON

Gas-type independent above 10 mbar - allows safe venting with any gas mixture

High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

Fast atmospheric detection eliminates waiting time and shortens process cycle

Versatile mounting orientation provides engineering freedom in tool design

fully ceramic coated sensor unit for highly corrosive applications

Easy to exchange plug & play sensor element with onboard calibration data guarantees high reproducibility and low cost of ownership        

Power Connection

9 pins D-sub connector. 

Power Adapter

One 15 VDC power adapter is included and ready to use. Input voltage for the adapter is 110~240 V.

Measurement Range

3.8E-5 to 1125 Torr.

Accuracy

​5×10-4 … 1×10-3 mbar (N2) ±50% of reading

1×10-3 … 100 mbar (N2) ±15% of reading 

100 … 950 mbar ±5% of reading 

950 … 1050 mbar ±2.5% of reading 

Display

Digital display (20x14 mm) with measurement unit Torr 

Gauge Fitting

Small Foot-Print with KF16 port

Dimensions

46 mm×28 mm×126 mm (L x W x H)

Shipping Weight

5 lbs

Warranty

One year limited manufacturer warranty, please contact  vc.service.usa@inficon.com for information.

In the case of severe contamination or malfunction, the sensor can be replaced, please read the instruction for details. Replacement sensor is offered at $574/each)

Calibration

The pressure gauge is manufactured calibrated base on PTB / METAS (German / Swiss NIST) standards. Calibration data is available upon request.

Application Notes

General vacuum measurement and control in the Medium Vacuum Range (Range 1.0E-4 Torr to ATM).

Pirani gauges used in a clean environment can effectively operate above 5.0E-5 Torr range. 

If your tool requires effective reading in the 1.0E-5 Torr or lower, please select Pirani/Cold Cathode gauge with measurement range from 3.75E-9 to 760 Torr

Optional: M14 to KF16 adapter is needed for the use with MTI vacuum flanges, please click pic below to order replacement part

By connecting to a set of Solenoid Valves, this gauge can also be used with a pressure control system to keep the pressure constant in a vacuum system.

INFICON

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