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1700℃高温CVD系统
①It is composed of 1700 degree tubular furnace, three-way mass flowmeter system and domestic high vacuum system (or optional low vacuum system)
由1700度管式炉、三路质量流量计系统以及国产高真空系统(或选配低真空系统)所组成
②The equipment technology is mature, the quality is reliable, the temperature field is uniform, the structure is reasonable
设备技术成熟、质量可靠，温场均匀，结构合理
③The air circuit uses the LCD screen touch interface, which makes the operation extremely simple and convenient; The technical parameters of the equipment
气路选用液晶屏触摸界面，使得操作异常简单、方便;设备的各项技术参数
④The 30-section programmable temperature control system is clear at a glance, so that the operation of the whole experiment is under your control
30段可编程温控系统更是一目了然,使整个实验的运行状态尽在您的掌控之中
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Heating zone parameter 加热区参数 |
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Power supply 电源 |
AC 208-240V Single Phase，50/60 Hz 交流208-240V单相，50/ 60hz Rated powe 5.2kw 额定功率 5.2kw |
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Operating temperature 工作温度 |
Maximum temperature:1650℃ 最高温度：1650℃ ontinuous working temperature: 1550℃ 持续工作温度：1550℃ Recommended heating speed: below 1400℃ ≤10℃/min, 1400℃ to 1600℃≤5℃/min 推荐升温速度：1400℃以下≤10℃/min，1400℃到1600℃≤5℃/min |
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Temperature Controller 控温方式 |
PID automatic control and auto-tune function 模糊PID控制和自整定调节 30 programmable segments for precise thermal processing 智能化30段可编程控制 Built-in protection for the over-heated and broken thermocouple 超温和断偶报警功能 |
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Heating Zone 加热 |
Heating Zone Length:300mm 加热区长度：300mm Constant Temperature Zone: 150mm 恒温区长度：150mm Temperature Accuracy: +/- 1℃. 控温精度：+/- 1℃ |
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Furnace tube size 炉管尺寸 |
Diameter 60/80*1000mm (pipe diameter optional) Ф60/80*1000mm（管径可选） |
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Heating Elements 加热元件 |
Silicon molybdenum rod 硅钼棒 |
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Overall dimensions 外形尺寸 |
610x440x720mm |
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Standard fittings 标准配件 |
One high purity corundum tube, alumina tube blocked 2 pairs 高纯刚玉管1支，氧化铝管堵2对 Stainless steel flange 1 set, fluorine rubber sealing ring 2 sets 不锈钢法兰1套，氟胶密封圈2套 High temperature gloves 1 pair, crucible hook 1, small safety 1 高温手套1副，坩埚钩1支，小保险1个 |
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Sealing system 密封系统 |
Stainless steel sealing flanges at both ends (including precision needle valve, pointer vacuum pressure gauge and hose type pagoda nozzles), the ports can be expanded for actual use 炉管两端配有不锈钢密封法兰(包括精密针阀，指针式真空压力表和软管式宝塔嘴接头)，端口可按实际使用扩展 |
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Gas path system parameters 气路系统参数 |
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Mass flowmeter reference range (N2) 质量流量计参考量程（N2) |
100sccm, 200sccm, 500sccm (range optional) 100sccm、200sccm、500sccm (量程可选) |
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Degree of accuracy 准确度 |
±1.5% |
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Linear 线性 |
±0.5～1.5% |
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Repeated accuracy 重复精度 |
±0.2% |
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Response time 响应时间 |
≤10sec |
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Working pressure difference range 工作压差范围 |
0.1～0.5 MPa |
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Maximum pressure 最大压力 |
3MPa |
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Interface 接口 |
Φ6,1/4'' |
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Display 显示 |
4 digit display 4位数字显示 |
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Operating ambient temperature 工作环境温度 |
5~45 high purity gas 5~45高纯气体 |
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Inner and outer double cast stainless steel tube 内外双抛不锈钢管 |
Φ6 |
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Pressure vacuum gauge 压力真空表 |
-0.1～0.15 MPa, 0.01 MPa/格 |
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Stop off valve 截止阀 |
Φ6 |
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Connection header type 连接头类型 |
Double sleeve stainless steel connector 双卡套不锈钢接头 |
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Optional one ways, two ways, three ways, four ways, five ways and more mass flowmeters 可选配一路、两路、三路、四路、五路等以上质量流量计 |
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Low vacuum system parameters 低真空系统参数 |
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Pumping speed 抽速 |
10m³/h |
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Limit vacuum degree 极限真空度 |
5*10-1pa |
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Power source 电源 |
220v 50hz |
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Power of motor 电机功率 |
0.4kw |
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Inlet and exhaust connection port 进排气连接口 |
KF25 |
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Amount of oil 用油量 |
1.1L |
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Speed of motor 电机转速 |
1440rpm |
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Operating ambient temperature 工作环境温度 |
5-40℃ |
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The noise 噪音 |
≤56db |
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Resistance vacuum gauge parameters 电阻真空计参数 |
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Equipped with gauge pipe 配用规管 |
Pirani gauge 电阻规 |
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Range of measurement 测量范围 |
105～10-1 Pa |
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Number of ways of measurement 测量路数 |
1路 |
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Range of control 控制范围 |
5×103～5×10-1Pa |
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Mode of control 控制方式 |
Relay contact output, load capacity AC220V/3A (or DC28V/3A) non inductive load 继电器触点输出，负载能力 AC220V/3A (或DC28V/3A)无感负载 |
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Power source 电源 |
90-260V/50Hz or 220V ± 10% 50Hz |
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Power consumption 功耗 |
20W |
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The bellows manual flapper valve is connected with the vacuum system 采用波纹管手动挡板阀与真空系统相连接 |
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High vacuum system parameters 高真空系统参数 |
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Relative air humidity 空气相对湿度 |
≤85% |
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Operating voltage 工作电压 |
AC220V±10% 50/60HZ |
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Power 功率 |
1KW |
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Overall limit vacuum degree of the system 系统整体极限真空度 |
10-5Pa |
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Degree of experimental vacuum 实验真空度 |
10-3Pa |
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Overall dimensions 外形尺寸 |
850×600×650mm |
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Mechanical pump 机械泵 |
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Pumping rate 抽气速率 |
10m³/h |
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Capacity of oil 容油量 |
1.1L |
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Power of motor 电机功率 |
400W |
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Ultimate pressure 极限压强 |
6×10-2Pa |
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Molecular pump 分子泵 |
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Pumping rate 抽气速率 |
100L/S |
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Ultimate pressure 极限压强 |
6×10-6Pa |
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Start up time 启动时间 |
＜2min |
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Rated speed of rotation 额定转速 |
4300 revolutions per minute 4300转/分 |
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Mode of cooling 冷却方式 |
When the ambient temperature is 5-32℃, it is air-cooled. At 5-40℃, water cools 环境温度5-32℃时，风冷；5-40℃时，水冷 |
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Molecular pump controller 分子泵控制器 |
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Voltage 电压 |
220V±22V |
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Start up current 启动电流 |
≤7A |
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Frequency of input 输入频率 |
47HZ~63HZ |
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Maximum output power 最大输出功率 |
≤150W |
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Maximum acceleration voltage 最大加速电压 |
≤40V |
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Time of acceleration 加速时间 |
≤3min |
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Frequency (two-speed) 频率（双速） |
High speed: 705HZ±10HZ 高速：705HZ±10HZ Low speed: 430HZ±5HZ 低速：430HZ±5HZ |
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Composite vacuum gauge 复合真空计 |
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Number of ways of measurement 测量路数 |
2 channels (1 channels each for resistance gauge and ionization gauge) 2路（电阻规、电离规各1路） |
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Mode of operation 工作模式 |
Manual/Automatic 手动/自动 |
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电阻单元参数（Resistance element parameter） |
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Type of regulation 规管型号 |
Electric resistance gauge 电阻规 |
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Range of measurement 测量范围 |
1.0×105Pa~1.0×10-1Pa |
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Range of effectiveness 有效范围 |
2.5×103Pa~5.0×10-1Pa |
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Range of control 控制范围 |
2.5×103Pa~5.0×10-1Pa |
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电离单元参数（Ionization unit parameter） |
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Type of regulation 规管型号 |
Electric resistance gauge 电离规 |
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Range of measurement 可测范围 |
5.0Pa~1.0×10-5Pa |
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Range of effectiveness 有效范围 |
1.0Pa~5.0×10-5Pa |
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Range of control 控制范围 |
1.0Pa~5.0×10-5Pa |
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Regulate degassing methods 规管除气方式 |
Joule degassing 焦耳去气 |
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其他参数（Other Parameters） |
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Number of control channels 控制路数 |
4路 |
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Mode of control 控制方式 |
Point or area control/power down memory 点动或区域控制/带掉电记忆 |
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Precision of control 控制精度 |
±1% |
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Time of sampling 采样时间 |
1s |
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Power source 电源 |
220V±10% 50HZ |
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Power consumption 功耗 |
50W |
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Operating ambient temperature 使用环境温度 |
0℃~45℃ |
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Humidity 湿度 |
≤85% |
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Connecting pipes 连接管路 |
It is made of stainless steel and electric polished 采用全不锈钢，电抛光制作 The welding leakage rate of the parts is better than 1.0×10-9Pa.m3/s 零件焊接漏率优于1.0×10-9Pa.m3/s The bellows manual flapper valve is connected with the vacuum system 采用波纹管手动挡板阀与真空系统相连接 |
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Note: Low vacuum or high vacuum system can be selected according to technological requirements 备注：可根据工艺要求选配低真空或高真空系统 |
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