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前端预热PECVD（Front preheating PECVD）
The sliding-track PECVD system developed by our company can make the whole experimental chamber in the glow generation area, and glow is uniform and equivalent. This technology can well solve the unstable state of traditional plasma operation, so the range and intensity of ionization is one hundred times that of traditional PECVD, and solve the phenomenon of uneven accumulation of materials. The fully automatic Plasma Enhanced CVD system (PECVD) enables continuous sliding temperature zones for continuous control of temperature and Plasma intensity. PECVD generates plasma by means of glow discharge and other methods. In glow discharge plasma:
1, the electron density of 109-1012cm3 electron gas temperature is 10-100 times higher than the temperature of ordinary gas molecules, so that gaseous substances containing film composition chemical reaction, so as to achieve a new preparation technology of film material growth.
2, The reaction characteristics of non-equilibrium plasma are effectively utilized through the reaction gaseous discharge, and the energy supply mode of the reaction system is fundamentally changed. The low temperature hot plasma chemical vapor deposition method has all the advantages of the gas phase method, and the process flow is simple.
我公司研制的滑轨式PECVD系统能使整个实验腔体都处于辉光产生区，辉光均匀等效，这种技术很好的解决了传统等离子工作不稳定状态，这样离子化的范围和强度是传统PECVD的百倍，并解决了物料不均匀堆积现象。该款设备是全自动Plasma增强CVD系统（PECVD），系统可以实现连续滑动温区，连续可控制温度及Plasma强度。PECVD是借助于辉光放电等方法产生等离子体，辉光放电等离子体中：
1、电子密度高109-1012cm3电子气体温度比普通气体分子温度高出10-100倍，使含有薄膜组成的气态物质发生化学反应，从而实现薄膜材料生长的一种新的制备技术。
2、通过反应气态放电，有效地利用了非平衡等离子体的反应特征，从根本上改变了反应体系的能量供给方式低温热等离子体化学气相沉积法具有气相法的所有优点，工艺流程简单。
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Front-end preheater 前端预热器 |
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Service temperature 使用温度 |
400℃ |
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Furnace material 炉膛材料 |
Alumina, high temperature fiber products 氧化铝、高温纤维制品 |
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Thermocouple type 热电偶类型 |
Type K thermocouple K型热电偶 |
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Temperature control accuracy 控温精度 |
±1℃ |
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Temperature control mode 控温方式 |
30 sections can be programmed to control temperature 30段可编程控温 PID parameter self-tuning PID参数自整定 Operation interface for 7 "industrial computer, built-in PLC control program 操作界面为7’’工控电脑，内置PLC控制程序 The temperature control system and slide rail furnace sliding (time and distance) can be set as program control 可将温控系统、滑轨炉滑动（时间和距离）设定为程序控制 |
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Heating length 加热长度 |
100mm |
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Heating element 加热原件 |
Resistance wire 电阻丝 |
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Heating furnace 加热炉 |
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Maximum temperature 最高温度 |
1200℃ |
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Service temperature 使用温度 |
≤1100℃ |
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Effective furnace size 炉膛有效尺寸 |
φ100mm (Suitable for 2-3 inch samples,furnace tube diameter can be customized according to actual needs) φ100mm（适用于2-3英寸样品，炉管直径可根据实际需要定制） |
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Furnace material 炉膛材料 |
Alumina, high temperature fiber products 氧化铝、高温纤维制品 |
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Thermocouple type 热电偶类型 |
Type K thermocouple K型热电偶 |
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Temperature control accuracy 控温精度 |
±1℃ |
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Temperature control mode 控温方式 |
30 sections can be programmed to control temperature 30段可编程控温 PID parameter self-tuning PID参数自整定 Operation interface for 7 "industrial computer, built-in PLC control program 操作界面为7’’工控电脑，内置PLC控制程序 |
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Heating length 加热长度 |
440mm |
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Constant temperature length 恒温长度 |
200mm |
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Heating element 加热原件 |
Resistance wire 电阻丝 |
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Power supply 供电电源 |
Single-phase, 220V, 50Hz 单相，220V，50Hz |
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PE system PE系统 |
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Power output range 功率输出范围 |
0W~500W |
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Maximum reflected power 最大反射功率 |
100W |
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Rf output interface 射频输出接口 |
50 Ω, N-type, female |
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Power stability 功率稳定度 |
≤5W |
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Harmonic component 谐波分量 |
≤-50dbc |
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Supply voltage 供电电压 |
Single-phase AC (187V-253V) frequency 50/60 Hz 单相交流（187V-253V） 频率50/60HZ |
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Overall efficiency 整机效率 |
≥70% |
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Power factor 功率因素 |
≥90% |
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Cooling mode 冷却方式 |
Forced air cooling 强制风冷 |
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Three-way proton flow control system 三路质子流量控制系统 |
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Connector type 连接头类型 |
Double-ferrule stainless steel joint 双卡套不锈钢接头 |
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Standard range (N2) 标准量程（N2) |
50sccm, 100sccm, 500sccm (can be customized according to user requirements) 50sccm，100sccm、500sccm（可根据用户要求定制） |
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Accuracy 准确度 |
±1.5%F.S |
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Linearity 线性 |
±1%F.S |
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Repetition accuracy 重复精度 |
±0.2%F.S |
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Response time 响应时间 |
Gas characteristics: 1 ~ 4 Sec, electrical characteristics: 10 Sec 气特性：1～4 Sec，电特性：10 Sec |
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Range of working pressure difference 工作压差范围 |
0.1～0.5 MPa |
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Maximum pressure 最大压力 |
3MPa |
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Interface 接口 |
Φ6,1/4'' |
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Display 显示 |
4-digit display 4位数字显示 |
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Operating ambient temperature 工作环境温度 |
5~45 high purity gas 5~45高纯气体 |
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Pressure vacuum gauge 压力真空表 |
－0.1～0.15 MPa, 0.01 MPa/格 |
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Stop valve 截止阀 |
Φ6 |
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Inside and outside double cast stainless steel tube 内外双抛不锈钢管 |
Φ6 |
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Low vacuum unit 低真空机组 |
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Relative humidity of air 空气相对湿度 |
≤85% |
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Working environment 工作环境 |
5℃～40℃ |
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Operating voltage 工作电电压 |
220V±10% 50~60HZ |
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Power 功率 |
1KW |
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pumping rate 抽气速率 |
10m3/h |
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Limiting vacuum 极限真空 |
5X10-1Pa |
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Working pressure range 工作压力范围 |
1.01325X105～1.33X10-2Pa |
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Withstand voltage value 耐压值 |
0.03MPa |
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Oil capacity 容油量 |
1.1L |
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Air inlet diameter 进气口口径 |
KF25 |
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Exhaust port diameter 排气口口径 |
KF25 |
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Noise 噪音 |
50dB |
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Connection mode 连接方式 |
The bellows is used, and the manual baffle valve is connected with the bellows 采用波纹管，手动挡板阀与波纹管相连 |