单工位大口径快速退火炉

Simplex large-diameter rapid annealing furnace is composed of single-ended sealing small infrared slide furnace, motor speed regulating device, high vacuum unit, air inlet and outlet and operation control interface. Internally controlled thermocouple is used to control the temperature in RTP slide furnace. Servo motor is used to control the rotation speed of the screw to accurately control the speed of removing furnace tube (sample). Thus, it can be used to adjust the cooling rate of the furnace tube (sample). On the contrary, a faster heating rate can be obtained. The air outlet is used to obtain the vacuum in the quartz cabin body by connecting the manual baffle valve and bellows. The air inlet is not only used to pass the protective gas or reaction gas, but also can be used to quickly cool the heat taken away by the incoming gas after moving out of the furnace, so as to obtain a high cooling rate.

单工位大口径快速退火炉是由单端封口小型红外滑轨炉、 电机调速装置、高真空机组、进出气口及操作控制界面组成，内控热电偶用于控制RTP滑轨炉内的温度，伺服电机用于控制丝杆的转动速度达到精确控制炉管（样品）移除炉膛的速度，从而用于调节炉管（样品）的降温速度，与之相反可以得到较快的升温速率；出气口通过连接手动挡板阀、波纹管用于对石英舱体内的真空获取，进气口除用于通入保护气体或反应气体外，还可以用于移出炉膛后通入气体带走热量的快速降温，以此获得较高的降温速率。

结构与原理：

Equipment composition: single-end sealing small infrared slide furnace, motor speed regulating device, high vacuum unit, flow control system and industrial control computer operating system.

设备组成：单端封口小型红外滑轨炉、 电机调速装置、高真空机组、流量控制系统及工控电脑操作系统。

1. Single-end sealing small infrared slide furnace:

1、单端封口小型红外滑轨炉：

The heating system adopts international advanced manufacturing technology, novel shape and reasonable structure, furnace body furnace tube can realize automatic separation, furnace body up and down two half design, pneumatic spring support structure so that the operator can open freely from all angles, safe and reliable. The furnace is formed by vacuum adsorption of high density pure alumina and light fiber material. The surface is coated with ultra-high temperature protective coating with high reflectivity, which can not only maintain the minimum energy loss, but also enhance the high temperature stability and effectively reduce the heat energy loss.

该加热系统采用国际先进制造工艺，造型新颖结构合理，炉体炉管可实现自动分离，炉体上下两半设计，气动弹簧支撑结构让操作者可各角度自由打开，安全可靠。炉胆采用高密度纯氧化铝聚轻纤维材料真空吸附成型，表面涂覆高反射率的超高温保护涂层，除能够保持其能量的最低损耗，还能增强高温稳定性，可有效减少热能损耗。

The heating system of the slide furnace is heated by infrared lamp tube, and the internal temperature of the quartz chamber is displayed in real time by means of temperature control of the built-in thermocouple. The length of the heating zone is 370mm, and the length of the constant temperature zone is 200mm, so as to ensure that two φ100*100mm fixtures can be placed in the constant temperature zone. In order to make the samples in the center of the furnace tube, the height of the quartz shelf is considered. The uniformity of the temperature field within 210mm and 200mm of the constant temperature zone is controlled within ±5℃, and the heating rate is less than 30℃/s. The whole quartz cavity is directly drawn out of the furnace. The sample cooling process can be rapidly cooled under the condition that a certain amount of protective gas is introduced, and the average cooling rate can reach 2℃/s. The reaction area of the sample is located in a closed quartz cavity, which greatly reduces the possibility of indirect contamination of the sample while completing the process. Quartz tube plug is used to maintain the uniformity of temperature field in the furnace and the cleanliness in the quartz cabin body.

该滑轨炉加热系统由红外灯管加热，采用内插热电偶控温的方式实时显示石英腔体内部温度，加热区长度为370mm，恒温区长度200mm，确保两个φ100*100mm的夹具可放置在恒温区内，为让样品在炉管内的中心位置，考虑石英置物架的高度，石英管管径综合考虑在210mm，恒温区200mm内的温场均匀性控制在±5℃，升温速率≤30℃/s, 整个石英腔体直接划出炉膛，样品降温过程可在通入一定量保护气体的条件下快速降温，平均降温速率可达到2℃/s， 试样反应区处在一个密闭的石英腔体内，在完成工艺的同时大大降低了间接污染试样的可能性。采用石英管堵维持炉内的温场均匀性及石英舱体内的洁净度。

2. Motor speed regulating device:

2、电机调速装置：

The servo motor speed regulating device is used to control the rotation speed of the screw, so as to control the overall movement speed of the furnace tube part (including samples), so as to adjust the target speed of rapid rising and cooling. The motor rotation speed is displayed in real time and can be accurately controlled, so as to obtain the accurate movement speed and meet the requirements of process parameters in cooling.

伺服电机调速装置用于控制丝杆的转动速度，达到控制炉管部分的整体移动速度（含样件），以此调整快速升降温的目标速率，电机旋转速度实时显示并且精确可控，以获得精确的移动速度，满足降温时工艺参数要求。