TEL:400-0033-603
销售热线：
总经理投诉电话：18009693519
最新：ESI大学及材料学科排行榜发布！
中国大陆一共418所高校有学科进入全球前1%，其中新增9所，无退出。新增高校为：西南民族大学、上海纽约大学、江苏海洋大学、宁波工程学院、天津大学-新加坡国立大学福州联合学院、陕西中医药大学、湖南工程学院、湖北经济学院、山东工商学院。
展会邀约 | 贝意克与您相约2023中国国际先进陶瓷展览会
印度将成为培育钻石的最大市场
布朗大学研究人员通过观察石墨烯中的自旋结构，找到了解决二维电子领域障碍的方法
------- 实验室预约 --------
微信公众号
浏览量:
产品名称
单温区滑轨式PECVD系统（Single temperature zone sliding rail PECVD system）
所属分类
简易版
零售价
0.00
数量
-
+
库存
0
联系我们
在线咨询
产品描述
产品参数
Alumina fiber products are used in the heating chamber of high temperature vacuum furnace. Its very low thermal conductivity and specific heat capacity ensure the rapid temperature rise and low heat storage in the furnace. It is especially suitable for the material technology research of scientific research institutions. The heating element is heated with resistance wire, which is beneficial to the uniform distribution of temperature field in the furnace. The temperature control system of high temperature vacuum resistance furnace adopts the classic closed-loop negative feedback control system, the temperature control instrument adopts the intelligent program temperature adjustment instrument temperature control, the power modulator control; The load is controlled by small voltage and large current, thus greatly improving the life of the heating element. The temperature measuring element uses K-type thermocouple. The single loop temperature controller can self-tune PID parameters, without the intervention of the operator, can adjust the output signal according to the different temperature curve, cooling requirements, at the same time the system is set up over temperature, under temperature, broken couple alarm protection function, greatly reducing the requirements of the operator experience, the key electrical components using high-quality imported products, high performance, maintenance-free, Improve the reliability of equipment quality.
高温真空炉加热腔体采用氧化铝纤维制品，其极低的热导率和比热容，保证了炉膛的快速升温和低蓄热，特别适合于科研单位的材料工艺研究。加热元件选用电阻丝加热，有利于炉内温度场的均匀分布。高温真空电阻炉温度控制系统采用经典的闭环负反馈控制系统，控温仪表选用智能型程序温度调节仪表控温，电力调制器控制；负载采用小电压大电流控制，从而大大提高了发热元件的寿命，测温元件采用K型热偶。采用单回路温控仪能够自整定PID 参数，无须操作人员的干预，可自行根据不同温度曲线的升、降温要求调整输出信号，同时系统设置了超温、欠温、断偶报警保护功能，大大降低了对操作人员经验的要求，关键电气元件采用优质的进口产品，做到高性能、免维护，提高了设备质量的可靠性。
|
Heating system 加热系统 |
|
|
Maximum temperature 最高温度 |
1200℃ |
|
Service temperature 使用温度 |
≤1100℃ |
|
Effective furnace size 炉膛有效尺寸 |
φ100mm (Suitable for 2-3 inch samples,furnace tube diameter can be customized according to actual needs) φ100mm（适用于2-3英寸样品，炉管直径可根据实际需要定制） |
|
Furnace material 炉膛材料 |
Alumina, high temperature fiber products 氧化铝、高温纤维制品 |
|
Thermocouple type 热电偶类型 |
Type K thermocouple K型热电偶 |
|
Temperature control accuracy 控温精度 |
±1℃ |
|
Temperature control mode 控温方式 |
30 sections can be programmed to control temperature 30段可编程控温 PID parameter self-tuning PID参数自整定 |
|
Heating length 加热长度 |
440mm |
|
Constant temperature length 恒温长度 |
200mm |
|
Heating element 加热原件 |
Resistance wire 电阻丝 |
|
Power supply 供电电源 |
Single-phase, 220V, 50Hz 单相，220V，50Hz |
|
PE radio frequency power supply PE射频电源 |
|
|
Power output range 功率输出范围 |
0W~500W |
|
Maximum reflected power 最大反射功率 |
100W |
|
Rf output interface 射频输出接口 |
50 Ω, N-type, female |
|
Power stability 功率稳定度 |
≤5W |
|
Harmonic component 谐波分量 |
≤-50dbc |
|
Supply voltage 供电电压 |
Single-phase AC (187V-253V) frequency 50/60 Hz 单相交流（187V-253V） 频率50/60HZ |
|
Overall efficiency 整机效率 |
≥70% |
|
Power factor 功率因素 |
≥90% |
|
Cooling mode 冷却方式 |
Forced air cooling 强制风冷 |
|
Three-way proton flow control system 三路质子流量控制系统 |
|
|
Connector type 连接头类型 |
Double-ferrule stainless steel joint 双卡套不锈钢接头 |
|
Standard range (N2) 标准量程（N2) |
50sccm, 100sccm, 500sccm (can be customized according to user requirements) 50sccm，100sccm、500sccm（可根据用户要求定制） |
|
Accuracy 准确度 |
±1.5%F.S |
|
Linearity 线性 |
±1%F.S |
|
Repetition accuracy 重复精度 |
±0.2%F.S |
|
Response time 响应时间 |
Gas characteristics: 1 ~ 4 Sec, electrical characteristics: 10 Sec 气特性：1～4 Sec，电特性：10 Sec |
|
Range of working pressure difference 工作压差范围 |
0.1～0.5 MPa |
|
Maximum pressure 最大压力 |
3MPa |
|
Interface 接口 |
Φ6,1/4'' |
|
Display 显示 |
4-digit display 4位数字显示 |
|
Operating ambient temperature 工作环境温度 |
5~45 high purity gas 5~45高纯气体 |
|
Pressure vacuum gauge 压力真空表 |
－0.1～0.15 MPa, 0.01 MPa/格 |
|
Stop valve 截止阀 |
Φ6 |
|
Inside and outside double cast stainless steel tube 内外双抛不锈钢管 |
Φ6 |
|
Low vacuum unit 低真空机组 |
|
|
Relative humidity of air 空气相对湿度 |
≤85% |
|
Working environment 工作环境 |
5℃～40℃ |
|
Operating voltage 工作电电压 |
220V±10% 50~60HZ |
|
Power 功率 |
1KW |
|
pumping rate 抽气速率 |
10m3/h |
|
Limiting vacuum 极限真空 |
5X10-1Pa |
|
Working pressure range 工作压力范围 |
1.01325X105～1.33X10-2Pa |
|
Withstand voltage value 耐压值 |
0.03MPa |
|
Oil capacity 容油量 |
1.1L |
|
Air inlet diameter 进气口口径 |
KF25 |
|
Exhaust port diameter 排气口口径 |
KF25 |
|
Noise 噪音 |
50dB |
|
Connection mode 连接方式 |
The bellows is used, and the manual baffle valve is connected with the bellows 采用波纹管，手动挡板阀与波纹管相连 |
上一篇
双温区PECVD系统
小型滑轨式PECVD系统（Small sliding rail PECVD system）
下一篇