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双炉滑轨PECVD(Double furnace slide rail PECVD)
The double-temperature field sliding rail rapid heating furnace is a special furnace for graphene growth, which is also suitable for CVD experiments that require relatively fast rising and cooling rate. This equipment is modified based on the open-type vacuum tube furnace, which can directly push the constant high temperature required by the experiment to the sample during operation, so that the sample can get a rapid heating rate. The high temperature tube furnace can also be directly pushed away from the sample, so that the sample is directly exposed to room temperature environment, to obtain a rapid cooling rate.
双温场滑轨式快速升温炉是专为生长石墨烯研制的石墨烯生长专用炉,也同样适用于要求升降温速度比较快的CVD实验,这款设备是根据开启式真空管式炉改装而来的,操作时可将实验需要的恒定高温直接推到样品处,使样品能得到一个快速的升温速度,同样也可将高温的管式炉直接推离样品处,使样品直接暴露在室温环境下,得到快速的降温速率。
Heating system 双温场滑轨炉 |
|
Rated power 额定功率 |
4KW |
Nominal voltage 额定电压 |
AC 208-240V Single Phase,50/60 Hz |
Maximum temperature 最高温度 |
1200℃ |
Continuous operating temperature 持续工作温度 |
1100℃ |
Maximum rising and cooling rate 最大升& 降温速率 |
≤20℃/S |
Tube size 炉管尺寸 |
High purity quartz Pipe Φ50×1900 (pipe diameter optional) 高纯石英管Φ50×1900(管径可选) |
Heating length 加热长度 |
230+230mm |
Constant temperature length 恒温长度 |
100+100mm |
Temperature control mode 控温方式 |
Fuzzy PID control and self-tuning adjustment 模糊PID控制和自整定调节 Intelligent 30 - segment programmable control has the function of ultra - mild coupling alarm 智能化30段可编程控制具有超温和断偶报警功能 |
Temperature control accuracy 控温精度 |
±1℃ |
Sealing system 密封系统 |
304 stainless steel water-cooled sealing flanges at both ends of furnace tube (including precision needle valve, pointer vacuum pressure gauge) 炉管两端配304不锈钢水冷密封法兰(包括精密针阀,指针式真空压力表) The flange inlet end is equipped with two Φ6mm sleeve air intakes 法兰进气端配置两个Φ6mm卡套进气口 |
Weight 净重 |
80kg |
Radio-frequency power supply 射频电源 |
|
signal frequency 信号频率 |
13.56 MHz±0.005% |
Power output range 功率输出范围 |
L5W~500W |
Maximum reflected power 最大反射功率 |
200W |
Rf output interface 射频输出接口 |
50 Ω, N-type, female |
Power stability 功率稳定度 |
±0.1% |
Harmonic component 谐波分量 |
≤-50dbc |
Supply voltage 供电电压 |
Single-phase AC (187V-253V) frequency 50/60 Hz 单相交流(187V-253V) 频率50/60HZ |
Overall efficiency 整机效率 |
≥70% |
Power factor 功率因素 |
≥90% |
Cooling mode 冷却方式 |
Forced air cooling 强制风冷 |
Gas supply system 供气系统 |
|
Working voltage 工作电压 |
185~245V 50HZ |
Maximum power output 最大输出功率 |
18W |
Standard range of flowmeter 流量计标准量程 |
100sccm,200sccm,200sccm,500sccm(No special designation to nitrogen calibration, range optional) 100sccm,200sccm,200sccm,500sccm(非特殊指定以氮气标定,量程可选) |
Operating temperature 工作温度 |
5~45℃ |
Operating pressure differential 工作压差 |
0.1~0.5MPa |
Maximum pressure 最大压力 |
3MPa |
Degree of accuracy 准确度 |
±1.5% FS |
Measuring range 测量范围 |
-0.1~0.15 MPa(0.01 MPa/grid) |
Pin valve 针阀 |
316 stainless steel 316不锈钢 |
Air mixing tank 混气罐 |
Φ80×120mm |
Stop valve 截止阀 |
Φ6mm”316 stainless steel needle valve Φ6mm”316不锈钢针阀 |
Size 尺寸 |
600×600×650 mm |
Low vacuum unit VAU-02 低真空机组VAU-02 |
|
Relative humidity of air 空气相对湿度 |
≤85% |
Operating voltage 工作电压 |
220V±10% 50~60HZ |
pumping rate 抽气速率 |
8m3/h |
Limiting vacuum 极限真空 |
4X10-2Pa |
Experimental vacuum 实验真空度 |
1.0X10-1Pa |
Oil capacity 容油量 |
1.1L |
Air inlet diameter 进气口口径 |
KF25 |
Exhaust port diameter 排气口口径 |
KF25 |
Rotate speed 转速 |
1450rpm |
Noise 噪音 |
50dB |
Boundary dimension 外形尺寸 |
600x600x600mm |