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等离子辉光滑轨PECVD系统/Plasma glow slide PECVD system
①The heating chamber of PECVD high temperature vacuum furnace is made of alumina fiber products. Its very low thermal conductivity and specific heat capacity ensure the rapid temperature rise and low heat storage in the furnace, which is especially suitable for the material technology research of scientific research institutions.
PECVD高温真空炉加热腔体采用氧化铝纤维制品，其极低的热导率和比热容，保证了炉膛的快速升温和低蓄热，特别适合于科研单位的材料工艺研究。
②The heating element is heated with resistance wire, which is beneficial to the uniform distribution of temperature field in the furnace.
加热元件选用电阻丝加热，有利于炉内温度场的均匀分布。
③The temperature control system of high temperature vacuum resistance furnace adopts the classic closed-loop negative feedback control system, the temperature control instrument adopts the intelligent program temperature regulation instrument to control the temperature, and the power modulator to control the temperature.
高温真空电阻炉温度控制系统采用经典的闭环负反馈控制系统，控温仪表选用智能型程序温度调节仪表控温，电力调制器控制。
④The load is controlled by small voltage and large current, thus greatly improving the life of the heating element. The temperature measuring element uses K-type thermocouple.
负载采用小电压大电流控制，从而大大提高了发热元件的寿命，测温元件采用K型热偶。
⑤The single loop temperature controller can adjust the PID parameters without the intervention of the operator, and the output signal can be adjusted according to the requirements of different temperature curves.
采用单回路温控仪能够自整定PID 参数，无须操作人员的干预，可自行根据不同温度曲线的升、降温要求调整输出信号。
⑥At the same time, the system is equipped with the alarm protection function of over temperature, under temperature and broken couple, which greatly reduces the requirement of operator experience.
同时系统设置了超温、欠温、断偶报警保护功能，大大降低了对操作人员经验的要求。
⑦The key electrical components adopt high quality imported products to achieve high performance, maintenance-free, and improve the reliability of equipment quality.
关键电气元件采用优质的进口产品，做到高性能、免维护，提高了设备质量的可靠性。
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Heating system 加热系统 |
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Maximum temperature 最高温度 |
1200℃ |
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Service temperature 使用温度 |
≤1100℃ |
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Effective furnace size 炉膛有效尺寸 |
φ50/φ100mm (furnace tube diameter can be customized according to actual needs) φ50/φ100mm（炉管直径可根据实际需要定制） |
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Furnace material 炉膛材料 |
Alumina, high temperature fiber products 氧化铝、高温纤维制品 |
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Thermocouple type 热电偶类型 |
Type K thermocouple K型热电偶 |
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Temperature control accuracy 控温精度 |
±1℃ |
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Temperature control mode 控温方式 |
30 sections can be programmed to control temperature 30段可编程控温 PID parameter self-tuning PID参数自整定 Operation interface for 7/10 inch industrial computer built-in PLC control program 操作界面为7/10寸工控电脑内置PLC控制程序 |
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Heating length 加热长度 |
230mm/440mm |
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Constant temperature length 恒温长度 |
100mm/200mm |
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Heating element 加热原件 |
Resistance wire 电阻丝 |
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Power supply 供电电源 |
Single-phase, 220V, 50Hz 单相，220V，50Hz |
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PE radio frequency power supply PE射频电源 |
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Power output range 功率输出范围 |
0W~150/500W |
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Maximum reflected power 最大反射功率 |
100W |
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Rf output interface射频输出接口 |
50 Ω, N-type, female |
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Power stability 功率稳定度 |
≤5W |
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Harmonic component 谐波分量 |
≤-50dbc |
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Supply voltage 供电电压 |
Single-phase AC (187V-253V) frequency 50/60 Hz 单相交流（187V-253V） 频率50/60HZ |
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Overall efficiency 整机效率 |
≥70% |
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Power factor 功率因素 |
≥90% |
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Cooling mode 冷却方式 |
Forced air cooling 强制风冷 |
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Three-way proton flow control system 三路质子流量控制系统 |
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Connector type 连接头类型 |
Double-ferrule stainless steel joint 双卡套不锈钢接头 |
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Standard range (N2) 标准量程（N2) |
50sccm, 100sccm, 500sccm (can be customized according to user requirements) 50sccm，100sccm、500sccm（可根据用户要求定制） |
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Accuracy 准确度 |
±1.5%F.S |
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Linearity 线性 |
±1%F.S |
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Repetition accuracy 重复精度 |
±0.2%F.S |
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Response time 响应时间 |
Gas characteristics: 1 ~ 4 Sec, electrical characteristics: 10 Sec 气特性：1～4 Sec，电特性：10 Sec |
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Range of working pressure difference 工作压差范围 |
0.1～0.5 MPa |
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Maximum pressure 最大压力 |
3MPa |
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Interface 接口 |
Φ6,1/4'' |
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Display 显示 |
4-digit display 4位数字显示 |
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Operating ambient temperature 工作环境温度 |
5~45 high purity gas 5~45高纯气体 |
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Pressure vacuum gauge 压力真空表 |
－0.1～0.15 MPa, 0.01 MPa/格 |
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Stop valve 截止阀 |
Φ6 |
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Inside and outside double cast stainless steel tube 内外双抛不锈钢管 |
Φ6 |
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Low vacuum unit 低真空机组 |
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Relative humidity of air 空气相对湿度 |
≤85% |
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Working environment 工作环境 |
5℃～40℃ |
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Operating voltage 工作电电压 |
220V±10% 50~60HZ |
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Power 功率 |
1KW |
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pumping rate 抽气速率 |
10m³/h |
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Limiting vacuum 极限真空 |
5X10-1Pa |
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Working pressure range 工作压力范围 |
1.01325X105～1.33X10-2Pa |
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Withstand voltage value 耐压值 |
0.03MPa |
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Oil capacity 容油量 |
1.1L |
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Air inlet diameter 进气口口径 |
KF25 |
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Exhaust port diameter 排气口口径 |
KF25 |
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Noise 噪音 |
50dB |
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Connection mode 连接方式 |
The bellows is used, and the manual baffle valve is connected with the bellows 采用波纹管，手动挡板阀与波纹管相连 |